Fabrication and characterization of PZT string based MEMS devices
Title: | Fabrication and characterization of PZT string based MEMS devices |
Authors: | D.T. Huong Giang N.H. Duc G. Agnus T. Maroutian P. Lecoeur |
Keywords: | Piezoelectric;Clampedeclamped beam;String based MEMS;CeV characteristics;Optical interferometer profiler |
Issue Date: | 2016 |
Publisher: | ĐHQGHN |
URI: | http://repository.vnu.edu.vn/handle/VNU_123/58322 |
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