Fabrication and characterization of PZT string based MEMS devices
Title: Fabrication and characterization of PZT string based MEMS devices Authors: D.T. Huong Giang N.H. Duc G. Agnus T. Maroutian P. Lecoeur Keywords: Piezoelectric;Clampedeclamped beam;String based MEMS;CeV characteristics;Optical interferometer profiler Issue Date: 2016 Publisher: ĐHQGHN URI: http://repository.vnu.edu.vn/handle/VNU_123/58322 String based MEMS devices recently attract world technology development thanks to their advantages over cantilever ones. Approaching to this direction, the paper reports on the micro-fabrication and characterization of free-standing doubly clamped piezoelectric beams based on heterostructures of Pd/ FeNi/Pd/PZT/LSMO/STO/Si. The displacement of strings is investigated in both static and dynamic mode. The static response exhibits a bending displacement as large as 1.2 am, whereas the dynamic response shows a strong resonance with a high quality factor of around 35 depending on the resonant mode at atmosp...